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High Purity Line Diaphragm Valve "UCV Series"

Ultra-clean diaphragm valve "UCV Series" designed to meet the cleanliness requirements for semiconductor manufacturing equipment and its associated piping.

This catalog includes the following items: - 3L Series (All Metal Seal) - 2L Series (Soft Seal) - EVZS Series (Crimped Sheet) - 2LE Series (Compact Type) You can choose valves with specifications tailored to your application and fluid. Pressure ratings: 1MPa, 16MPa, 21MPa Temperature: 250°C (All Metal Seal 3LT) The 2L and 3L series use a double melt material body to minimize particle generation from the valve. This achieves a high level of cleanliness required for semiconductor devices and improves yield in manufacturing lines. Additionally, we also offer the 2LM series flow control valve, which can be used in high-purity lines. If you are looking for overseas specifications for diaphragm valves, monoblock valves, or valves compatible with surface mounting, please submit a request through the contact form. *For more details, please download the PDF or feel free to contact us.

  • valve
  • Piping Materials
  • Other semiconductor manufacturing equipment
  • Line Diaphragm Valve

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